Microstructuring with 157 nm laser light

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3618, Issue , 1999, Pages 413-417

  Endert, Heinrich ^a   Kauf, Michael ^a   Mayer, Eric ^a   Scaggs, Michael ^a   Fair, John ^a   Basting, Dirk ^a  

^a Lambda Physik USA Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLUORINE; FUSED SILICA; LASER ABLATION; LIGHTING; LITHOGRAPHY; MICROMACHINING; MICROSTRUCTURE; NANOTECHNOLOGY; POLYTETRAFLUOROETHYLENES; SCANNING ELECTRON MICROSCOPY;

ABLATION RATES; FLUORINE LASERS; MICROSTRUCTURING; THRESHOLD PARAMETERS;

EXCIMER LASERS;

EID: 0033363781     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)