Characterization of the surface structural, mechanical, and thermal properties of benzocyclobutene dielectric polymers using scanned probe microscopy

Macromolecular Symposia

Volumn 167, Issue , 2001, Pages 213-226

  Takahara, Atsushi ^a   Hara, Yukiko ^b   Kojio, Ken ^b   Kajiyama, Tisato ^b  

^a Institute for Fundamental Research of Organic Chemistry   (Japan)

^b KYUSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BENZOCYCLOBUTENE DERIVATIVE; POLYMER; UNCLASSIFIED DRUG;

ADHESION; CHEMICAL STRUCTURE; CONFERENCE PAPER; FILM; IMAGE ANALYSIS; POWER SPECTRUM; SCANNING PROBE MICROSCOPY; STRUCTURE ANALYSIS; SURFACE PROPERTY; THERMAL ANALYSIS;

EID: 0034997490     PISSN: 10221360     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-3900(200103)167:1<213::AID-MASY213>3.0.CO;2-D     Document Type: Conference Paper

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