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Experimental Mechanics

Volumn 41, Issue 2, 2001, Pages 165-173

Advances in scanning electron microscope moiré

(2) Chen, H a Liu, D a

a Michigan State University (United States)

Author keywords

Carbonaceous; Grating; Lithography; Moir ; Scanning electron microscope

Indexed keywords

CASTING; DIFFRACTION GRATINGS; ELECTRON BEAM LITHOGRAPHY; PHOTOGRAPHY;

SCANNING ELECTRON MICROSCOPES (SEM);

ELECTRON MICROSCOPES;

SCANNING ELECTRON MICROSCOPY;

EID: 0034993574 PISSN: 00144851 EISSN: None Source Type: Journal
DOI: 10.1007/BF02323193 Document Type: Article

Times cited : (19)

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