An approach to the reduction of hydrocarbon contamination in the scanning electron microscope

Scanning

Volumn 18, Issue 4, 1996, Pages 269-274

  Postek, Michael T ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Contamination; Hydrocarbon; Pump; Residual gas analysis; Scanning electron microscope; Transmission electron microscope; Vacuum

Indexed keywords

HYDROCARBON;

ARTICLE; ARTIFACT REDUCTION; ATMOSPHERIC PRESSURE; CONTAMINATION; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

EID: 0030317572     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.1996.4950180402     Document Type: Article

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