Application of MEMS in microwave and millimeter wave systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4236, Issue , 2001, Pages 179-187

  Varadan, V K ^a   Vinoy, K J ^a   Yoon, H ^a   Jose, K A ^a   Varadan, V V ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM TITANATE; DIELECTRIC FILMS; MICROMACHINING; MICROWAVES; MILLIMETER WAVE DEVICES; PHASE SHIFTERS; STRONTIUM COMPOUNDS; THIN FILM DEVICES;

BARIUM STRONTIUM TITANATE (BST); ELECTROSTATIC MICRO SWITCHES;

MICROELECTROMECHANICAL DEVICES;

EID: 0034991208     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.418756     Document Type: Conference Paper

References (18)

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