Thermoelectric power sensor for microwave applications by commercial CMOS fabrication

IEEE Electron Device Letters

Volumn 18, Issue 9, 1997, Pages 450-452

  Milanović, Veljko ^a   Gaitan, Michael ^b   Bowen, Edwin D ^c   Tea, Nim H ^b   Zaghloul, Mona E ^a  

^a George Washington University   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c RF Microsystems Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC CONTACTS; ELECTRIC NETWORK ANALYZERS; ETCHING; HEAT LOSSES; MICROMACHINING; SEMICONDUCTOR DEVICE MANUFACTURE; THERMOCOUPLES; THERMOELECTRICITY; WAVEGUIDES;

MASKLESS ETCHING; THERMOELECTRIC MICROWAVE POWER SENSORS;

SENSORS;

EID: 0031238204     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.622527     Document Type: Article

References (13)

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