Semiconductor-based field-effect structures for chemical sensing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4205, Issue , 2001, Pages 188-198

  Schoning M J ^a   Poghossian, A ^a   Yoshinobu, T ^a   Luth H ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Capacitance; EIS sensor; Field effect structure; LAPS; Penicillin; pH; Photocurrent; Sensor array

Indexed keywords

BIOSENSORS; BIOTECHNOLOGY; DEPOSITION; MAPPING; PH; PHOTOCURRENTS; POTENTIOMETRIC SENSORS; SEMICONDUCTOR DEVICE MANUFACTURE;

FEILD EFECT STRUCTURES;

SILICON SENSORS;

EID: 0034982130     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.417449     Document Type: Conference Paper

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