Pulsed laser deposition as a novel preparation technique for chemical microsensors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3857, Issue , 1999, Pages 124-134

  Schoening, Michael J ^a   Schubert, Juergen ^a   Zander, Willi ^a   Mueller Veggian, Mattea ^a   Legin, Andrey V ^a   Vlasov, Yuri G ^a   Kordos, Peter ^a   Lueth, Hans ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; DEPOSITION; HETEROJUNCTIONS; MICROSENSORS; PULSED LASER APPLICATIONS; SEMICONDUCTING GLASS; SEMICONDUCTING SILICON; SILICA; THIN FILM DEVICES; VAPORIZATION;

CHALCOGENIDE GLASS; PULSED LASER DEPOSITION;

PH SENSORS;

EID: 0033331455     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)