Polishing of CVD diamond films

Key Engineering Materials

Volumn , Issue 202-203, 2001, Pages 165-170

  Guo, Z N ^a   Wang, C Y ^a   Zhang, F L ^a   Kuang, T C ^a  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Diamond film; Electrical discharge machining; Polishing; Processing performance

Indexed keywords

CHEMICAL MECHANICAL POLISHING; CHEMICAL VAPOR DEPOSITION; ELECTRIC DISCHARGE MACHINING; MACHINABILITY; SURFACE ROUGHNESS;

ABRASIVE WATER JET POLISHING;

DIAMOND FILMS;

EID: 0034972596     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: None     Document Type: Article

References (26)

1. C.Z. Gu, Z.S. Jin: Functional Materials, Vol. 28/3 (1997), pp. 232ff.
2. H.Z. Zhang, X.Y. Yao: Tool Engineering, Vol. 31/6 (1997), pp. 3ff.
3. H. Fu, L. Hou: New Process and Technology, 6 (1997), pp. 39ff.
4. Z.D. Gao, X.Y. Shu: Tool Engineering, Vol.33/2 (1997), pp. 33ff.
5. L.J. Xe, X.D. Liu: Machinery Manufacturing Engineer, 3 (1997), pp. 2ff.
6. S.T. Huang, X.Y. Yao: New Process and Technology, 1 (1996), pp. 13ff.
7. M. Yoshikawa: Surface and coating Technology, Vol. 88 (1996), pp. 197ff.
8. M. Murakawa: Surface and Coatings Technology, Vol. 86-87 (1996), pp. 686ff.
9. Y.L. Fu: High Technology Letters, 1 (1996), pp. 1ff.
10. S. Jin: Symp, on Diamond Material, (1995), pp. 261ff.
11. S. Jin: Nature, Vol. 3/62 (1993), pp. 822ff.
12. X.M. Guo: Journal of Artificial Crystal, Vol. 26/2 (1997), pp. 158ff.
13. H. Tokura: Thin Solid Films, Vol. 212 (1997), pp. 49ff.
14. S.K. Choi: Thin and Films, Vol. 289/1-2 (1996), pp. 110ff.
15. B. Bhushan: Journal of Applied Physics, Vol. 74/6 (1993), pp. 41740ff.
16. K. Kobashi: Journal of Materials research, Vol. 11/11 (1996), pp. 2744ff.
17. Hirata: Thin Solid Films, Vol. 212 (1992), pp. 43ff.
18. G. Bovard: Applied Optics, Vol. 31/13 (1992), pp. 2306ff.
19. Yoshida: Nuclear Instruments and Methods in Physics Research, Vol. 112 (1996), pp. 248ff.
20. G. Ralchenko: Diamond Films Technology, Vol. 7/1 (1997), pp. 15ff.
21. V.P. Ageev: Materials & Manufacturing Processes, Vol. 8/1 (1993), pp. 1ff.
22. C.Z. Guo: Science Report. Vol.42, 6 (1997), pp. 661ff.
23. S.M. Pimenov: Diamond Films Technology. Vol.7, No.1(1997), pp. 61ff.
24. M. Hashish: Conference, August 28-31 (1993), pp. 793ff.
25. Z.N. Guo, C.Y. Wang, T.C. Kuang and Z.G. Huang: Proceedings of IMCC'2000, August 17-19 (2000), pp. 355ff.
26. A.P. Malshe, B.S. Park, W.D. Brown and H.A. Naseem: Diamond and Related Materials, Vol. 8 (1999), pp. 1198ff.