Etching of polycrystalline diamond films by electron beam assisted plasma

Journal of Materials Research

Volumn 11, Issue 11, 1996, Pages 2744-2748

  Kobashi, Koji ^a   Miyauchi, Shigeaki ^a   Miyata, Koichi ^a   Nishimura, Kozo ^a   Rocca, Jorge J ^b  

^a KOBE STEEL LTD   (Japan)

^b Engineering Research Center and Hydraulics Laboratory   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMISORPTION; COMPOSITION EFFECTS; CRYSTAL ORIENTATION; ELECTRON BEAMS; HELIUM; HYDROGEN; OXYGEN; PLASMA ETCHING; POLYCRYSTALLINE MATERIALS; SCANNING ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

PHYSISORPTION;

DIAMOND FILMS;

EID: 0030288154     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1996.0348     Document Type: Article

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