Leakage current and capacitance characteristics of Si/SiO2/Si single-barrier varactor

Applied Physics A: Materials Science and Processing

Volumn 72, Issue 5, 2001, Pages 633-637

  Mamor, M ^a   Fu, Y ^a   Nur, O ^a   Willander, M ^a   Bengtsson, S ^a  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; CAPACITANCE; CURRENT VOLTAGE CHARACTERISTICS; LEAKAGE CURRENTS; MATHEMATICAL MODELS; NUMERICAL ANALYSIS; QUANTUM THEORY; SILICA; THICKNESS MEASUREMENT;

SINGLE BARRIER VARACTOR; STATE OF THE ART WAFER BONDING;

VARACTORS;

EID: 0034968855     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390100862     Document Type: Article

References (12)