Normal incidence multilayer gratings for the extreme ultraviolet region: experimental measurements and computational modeling

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3766, Issue , 1999, Pages 364-370

  Seely, John F ^a   Goray, Leonid I ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM; ATOMIC FORCE MICROSCOPY; COATINGS; COMPUTER SIMULATION; MULTILAYERS; OPTICAL PROPERTIES; SILICA; SURFACE ROUGHNESS; THIN FILMS; ULTRAVIOLET RADIATION; X RAYS;

EXTREME ULTRAVIOLET REGION; NORMAL INCIDENCE MULTILAYER GRATINGS; REPLICATION PROCESS;

DIFFRACTION GRATINGS;

EID: 0033318634     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)