Formation, evolution, and annihilation of interstitial clusters in ion-implanted Si

Physical Review B - Condensed Matter and Materials Physics

Volumn 63, Issue 19, 2001, Pages

  Libertino, Sebania ^a   Coffa, Salvatore ^a   Benton, Janet L ^b  

^a CNR IMETEM   (Italy)

^b LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ION; SILICON;

ARTICLE; CHEMICAL ANALYSIS; CRYSTAL; DIFFUSION; DISSOCIATION; LOW TEMPERATURE; LUMINESCENCE; SPECTROSCOPY; TEMPERATURE; THERMAL ANALYSIS; WAVEFORM;

EID: 0034899614     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.63.195206     Document Type: Review

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