Multi-axial channeling study of disorder in gold implanted 6H-SiC

Materials Research Society Symposium - Proceedings

Volumn 640, Issue , 2001, Pages

  Jiang, W ^a   Weber, W J ^a   Thevuthasan, S ^a   Shutthanandan, V ^a  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; AMORPHOUS MATERIALS; CARBON; COMPUTER SIMULATION; GOLD; ION BOMBARDMENT; POSITIVE IONS; RAPID THERMAL ANNEALING; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SINGLE CRYSTALS;

MULTI-AXIAL CHANNELING; REORDERING PROCESS; SINGLE-CRYSTAL WAFERS; THRESHOLD DISPLACEMENT ENERGY;

SILICON CARBIDE;

EID: 0034869562     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)