Microscanner actuated by double PZT thin film

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4408, Issue , 2001, Pages 528-534

  Zhang, L ^a   Lin, W M ^a   Maeda, R ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Double layered PZT; Micro scanner; PZT; Residual stress

Indexed keywords

CRYSTAL ORIENTATION; DEPOSITION; DIELECTRIC PROPERTIES; FERROELECTRICITY; LEAD COMPOUNDS; LITHOGRAPHY; MICROACTUATORS; NATURAL FREQUENCIES; PLASMA ETCHING; RESIDUAL STRESSES; SCANNING; TEXTURES; THERMAL EXPANSION; THIN FILMS;

BIMORPH BEAM SCANNERS; MICROSCANNERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0034866620     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.425394     Document Type: Article

References (8)

1. Sol-gel derived PZT force sensor for scanning force microscopy
2. Microfabricated dynamic scanning force microscope using a three dimensional piezoelectric T-shape actuator
3. Application of thin PZT film for actuation of ID and 2D scanners
4. Two-dimensional microscanner actuated by PZT thin film
5. Preparation and characterization of sol-gel derived PZT thin films for micro actuators