Two-dimensional microscanner actuated by PZT thin film

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3892, Issue , 1999, Pages 133-140

  Lin, Wen Mei ^a   Schroth, Andreas ^a   Matsumoto, Sohei ^a   Lee, Chengkuo ^a   Maeda, Ryutaro ^a  

^a Div of Surface and Interface   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DEPOSITION; DIELECTRIC FILMS; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; MICROMACHINING; PIEZOELECTRIC MATERIALS; PLASMA ETCHING; REACTIVE ION ETCHING; SILICON; SOL-GELS; THIN FILMS;

DEEP SILICON ETCHING; TWO-DIMENSIONAL RESONANT MICROSCANNERS;

SCANNING;

EID: 0033309279     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)