Numerical approach for the frequency-shifting analysis of electrostatic micro-mechanical actuator

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4408, Issue , 2001, Pages 263-271

  Kwon, K C ^a   Lee, W S ^a   Kim, B K ^a   Cho, J H ^a   Youn, S K ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Coupled analysis; Electrostatic; Frequency shifting; Numerical method

Indexed keywords

ALGORITHMS; DEFORMATION; EIGENVALUES AND EIGENFUNCTIONS; ELECTRIC FIELDS; ELECTRIC POTENTIAL; ITERATIVE METHODS; LINEARIZATION; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PERMITTIVITY; PERTURBATION TECHNIQUES; STIFFNESS MATRIX;

ELECTROSTATIC FORCE; MICRO-MECHANICAL ACTUATORS;

ELECTROSTATIC ACTUATORS;

EID: 0034866615     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.425385     Document Type: Conference Paper

References (8)

1. Laterally driven polysilicon resonant microstructures
2. Eleclrostatic comb drive levitation and control method
3. Capacitance based tunable micromechanical resonators
4. A tunable optomechanical micromirror switch
5. A triangular electrostatic comb array for micromechanical resonant frequency tuning
6. Dynamic analysis of micro-electro-mechanical systems