A tunable optomechanical micromirror switch

Sensors and Materials

Volumn 10, Issue 3, 1998, Pages 155-167

  Seo, Kyoung Sun ^a   Cho, Young Ho ^a   Youn, Sung Kie ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Bulk micromachining; Electrostatic actuation; Frequency tuning; Micromirror; Optomechanical switch

Indexed keywords

EID: 0040577137     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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