Atomic-scale three-dimensional kinetic Monte Carlo simulation of organometallic vapor-phase epitaxy of ordered films

Physical Review B - Condensed Matter and Materials Physics

Volumn 63, Issue 16, 2001, Pages

  Deo, C S ^a,b   Srolovitz, D J ^a,b  

^a Princeton University   (United States)

^b PRINCETON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARTICLE; CHEMICAL REACTION; FILM; KINETICS; MOLECULAR DYNAMICS; SIMULATION; SURFACE PROPERTY; SYSTEM ANALYSIS; TEMPERATURE DEPENDENCE; VAPOR;

EID: 0034864943     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.63.165411     Document Type: Article

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