XPS and RBS analysis of the composition and structure of barium titanate thin films to be used in DRAMs

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4296, Issue , 2001, Pages 244-248

  Hernandez Cruz, D ^a   Sahouli, B ^a   Tork, A ^a   Knystautas, E J ^a   Lessard, R A ^a  

^a CENTRE D OPTIQUE   (Canada)

Author keywords

Barium titanate thin films; Composition and structure of BaTiO3; DRAMs; Ferroelectric films; RBS; Si; Sol gel; Thickness; XPS

Indexed keywords

BARIUM TITANATE; COMPOSITION; CRYSTAL STRUCTURE; DYNAMIC RANDOM ACCESS STORAGE; ELECTROOPTICAL EFFECTS; POLYCRYSTALLINE MATERIALS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; SOL-GELS; STOICHIOMETRY; SYNTHESIS (CHEMICAL); X RAY PHOTOELECTRON SPECTROSCOPY;

BARIUM TITANATE THIN FILMS; FERROELECTRIC FILMS; FILM THICKNESS;

FERROELECTRIC THIN FILMS;

EID: 0034863564     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.429465     Document Type: Conference Paper

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