SCOPUS 정보 검색 플랫폼

Journal De Physique. IV : JP

Volumn 11, Issue 3, 2001, Pages

Unique precursor delivery and control afforded by low-pressure pulsed-CVD process with ultrasonic atomization

(3) Krumdieck, S a Sbaizero, O a Raj, R a

a UNIVERSITY OF CANTERBURY (New Zealand)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIZATION; CHEMICAL REACTORS; FILM GROWTH; MICROSTRUCTURE; MORPHOLOGY; OPTICAL MICROSCOPY; POROSITY; SCANNING ELECTRON MICROSCOPY; ULTRASONICS; X RAY DIFFRACTION ANALYSIS;

ULTRASONIC ATOMIZATIONS;

CHEMICAL VAPOR DEPOSITION;

EID: 0034849228 PISSN: 11554339 EISSN: None Source Type: Conference Proceeding
DOI: 10.1051/jp4:20013146 Document Type: Conference Paper

Times cited : (6)

References (13)

1
- 0033309718
- Apr 5-8, (MRS, 1999)
- (1999) Materials Research Society Symposium Proceedings , vol.567 , pp. 397
- Zhang, J.-Y.¹ Boyd, I.W.² Mooney, M.B.³ Hurle, P.K.⁴ O'Sullivan, B.J.⁵ Beechinor, J.T.⁶ Kelly, P.V.⁷ Crean, G.M.⁸ Senateur, J.-P.⁹

2
- 0031673809
- (1998) J. Etectrochem. Soc. , vol.145 , Issue.1 , pp. 362-365
- Senzaki, Y.¹

3
- 0030123538
- (1996) Japanese J. of Appl. Phys. , vol.35 , Issue.4 B , pp. 2520-2525
- Van Buskirk, P.C.¹ Bilodeau, S.M.² Roeder, J.F.³ Kirlin, P.S.⁴

4
- 0003908951
- US Patent No. 5,451,260. CRF D-1394. Sono-Tek Corp. licensee
- Method and Apparatus for CVD using Liquid Delivery System with Ultrasonic Nozzle
- Raj¹

5
- 0029387039
- (1995) J. Amer. Ceram. Soc , vol.78 , Issue.10 , pp. 2763-2768
- Versteeg, V.A.¹ Avedisian, C.T.² Raj, R.³

6
- 0003590679
- University of Colorado at Boulder
- (1999) Experimental Characterization and Modeling for the Growth Rate of Oxide Coatings from Liquid Solutions of Metalorganic Precursors by Ultrasonic Pulsed Injection in a Cold Wall Low Pressure Reactor
- Krumdieck, S.P.¹

7
- 0032652998
- (1999) J. Amer. Ceram. Soc. , vol.82 , Issue.6 , pp. 1605
- Krumdieck, S.¹ Raj, R.²

8
- 0033719495
- (2000) Solid State Ionics , vol.131 , pp. 79
- Will, J.¹ Mitterdorfer, C.² Kleinlogel, D.³ Perendis, L.⁴ Gauckler, J.⁵

9
- 0032026409
- (1998) Phys. Stat. Sol. (a) , vol.166 , pp. 73
- Merkle, K.L.¹ Bai, G.-R.² Li, A.³ Song, C.-Y.⁴ Thompson, L.J.⁵

10
- 0033743771
- (2000) Materials Letters , vol.44 , pp. 23
- Wang, H.B.¹ Xia, C.R.² Meng, G.Y.³ Peng, D.K.⁴

11
- 0003903469
- (1998) Thin Solid Films , vol.317 , pp. 173
- Garcia, G.¹ Figueras, A.² Merino, R.I.³ Orera, V.M.⁴ Llibre, J.⁵

12
- 0347118242
- edited by E. Lang, Applied Science Publishers, London
- (1981) Coatings for High Temperature Applications , pp. 79
- Teer, D.G.¹

13
- 4244201555
- (1998) Surf. and Coat. Tech. , vol.100-101 , pp. 164
- Martinez, E.¹ Esteve, J.² Garcia, G.³ Figueras, A.⁴ Llibre, J.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.