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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4407, Issue , 2001, Pages 147-157

Micro stereo lithography for fabrication of 3D polymeric and ceramic MEMS

(2) Varadan, V K a Varadan, V V a

a PENNSYLVANIA STATE UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ASPECT RATIO; CERAMIC MATERIALS; FABRICATION; LITHOGRAPHY; OPTICAL FIBERS; STRAIN;

MICRO STEREO LITHOGRAPHY (MSL);

MICROELECTROMECHANICAL DEVICES;

EID: 0034846168 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.425296 Document Type: Conference Paper

Times cited : (12)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.