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Volumn 13, Issue 3, 2001, Pages 1095-1100

Molecular orbital studies of titanium nitride chemical vapor deposition: Imido dimer formation and elimination reactions

(3) Cross, J B a Smith, S M a Schlegel, H B a

a WAYNE STATE UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIMER; TITANIUM DERIVATIVE;

ARTICLE; CHEMICAL REACTION; CHEMICAL STRUCTURE; DIMERIZATION; ENERGY; ENTHALPY; FILM; LIGAND BINDING; QUANTUM THEORY; REACTION ANALYSIS; STRUCTURE ANALYSIS; VAPOR;

EID: 0034840452 PISSN: 08974756 EISSN: None Source Type: Journal
DOI: 10.1021/cm000840c Document Type: Article

Times cited : (5)

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