Theoretical ab initio study of TiCl4 ammonolysis: Gas phase reactions of TiN chemical vapor deposition

Journal of Molecular Modeling

Volumn 6, Issue 4, 2000, Pages 413-424

  Siodmiak, Magdalena ^a   Frenking, Gernot ^a   Korkin, Anatoli ^b  

^a PHILIPPS UNIVERSITY MARBURG   (Germany)

^b MOTOROLA INC   (United States)

Author keywords

Ab initio calculations; Ammonolysis; Chemical vapor deposition; Donor acceptor complexes; Titanium nitride

Indexed keywords

EID: 0001012982     PISSN: 16102940     EISSN: None     Source Type: Journal    
DOI: 10.1007/pl00010740     Document Type: Article

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