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Volumn 4450, Issue , 2001, Pages 94-107
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Absolute extreme-ultraviolet metrology
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Author keywords
Extreme ultraviolet; Lithography; Metrology; Radiometry; Reflectometry; Synchrotron radiation
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Indexed keywords
ASTRONOMY;
ELECTROMAGNETIC WAVES;
LITHOGRAPHY;
OPTICAL VARIABLES MEASUREMENT;
PHOTODIODES;
PHYSICS;
PLASMAS;
RADIATION DETECTORS;
RADIOMETRY;
SPECTRUM ANALYSIS;
SYNCHROTRON RADIATION;
EXTREME ULTRAVIOLET METROLOGY;
HIGH QUALITY RADIOMETRIC DETECTORS;
PLASMA PHYSICS;
REFLECTOMETRY;
ULTRAVIOLET RADIATION;
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EID: 0034779467
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.431244 Document Type: Conference Paper |
Times cited : (9)
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References (36)
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