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Modern Physics Letters B

Volumn 14, Issue 14, 2000, Pages 523-530

Properties and preparation of AlN thin films by reactive laser ablation with nitrogen discharge

(1) Wang, H H a

a WUHAN UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRATE; NITROGEN;

ARTICLE; CHEMICAL STRUCTURE; DIELECTRIC CONSTANT; EXCIMER LASER; FILM; LASER SURGERY; REFRACTION INDEX; SEMICONDUCTOR; TEMPERATURE DEPENDENCE; X RAY; X RAY DIFFRACTION;

EID: 0034690985 PISSN: 02179849 EISSN: None Source Type: Journal
DOI: 10.1142/S0217984900000689 Document Type: Article

Times cited : (8)

References (34)

1
- 0018544561
- (1979) J. Vac. Sci. Technol. , vol.16 , pp. 2086
- Birey, H.¹ Pak, S.I.² Silcs, J.R.³ Wager, J.F.⁴

2
- 0019899469
- (1982) Ferroelectrics , vol.42 , pp. 219
- Shiosaki, T.¹ Kawabata, A.²

3
- 0020799022
- (1983) J. Appl. Phys. , vol.54 , pp. 4586
- Fathimulla, A.¹ Lakham, A.A.²

4
- 0026151830
- (1991) Proc. IEEE , vol.79 , pp. 702
- Davis, R.F.¹

5
- 0000815007
- (1992) J. Vac. Sci. Technol. , vol.10 B , pp. 1237
- Stride, S.¹ Morkoe, H.²

6
- 0008039646
- Heteroepitaxial Semiconductors for Electronic Devices, eds. G. W. Cullen and G. C. Wang (Springer, New York)
- (1987)
- Duffy, M.T.¹

7
- 0008034608
- (1982) Jpn. J. Appl. Phys. , vol.21 , pp. 1102
- Morita, M.¹ Tsubouchi, K.² Mikoshiba, N.³

8
- 0015571420
- (1973) J. Appl. Phys. , vol.44 , pp. 292
- Yim, W.M.¹ Stofko, E.J.² Zanzucchi, P.J.³ Pankove, J.I.⁴ Ettenberg, M.⁵ Gilbert, S.L.⁶

9
- 0024088060
- (1988) Thin Solid Films , vol.164 , pp. 441
- Tansly, T.L.¹ Egan, R.J.² Horrigan, E.C.³

10
- 0037821169
- (1973) J. Phys. Chem. Solids , vol.34 , pp. 321
- Slack, G.A.¹

11
- 0023501552
- (1987) J. Phys. Chem. Solids , vol.48 , pp. 641
- Slack, G.A.¹ Tanzilli, R.A.² Pohl, R.O.³ Vandersande, J.W.⁴

12
- 0001754063
- (1982) Appl. Phys. Lett. , vol.40 , pp. 689
- Okamura, S.¹ Nishi, H.² Inada, T.³ Hashimoto, H.⁴

13
- 0015628441
- (1973) J. Electron. Mater. , vol.2 , pp. 359
- Duffy, M.T.¹ Wang, C.C.² O'Clock G.D., Jr.³ McFarlane III, S.H.⁴ Zanzucchi, P.J.⁵

14
- 0008154136
- 35th Electronic Components Conference, Washington, DC (IEEE, New York)
- (1985) , pp. 442
- Xingjiao, L.¹ Zechuan, X.² Ziyou, H.³ Huazhe, C.⁴ Wuda, S.⁵ Zhongcai, C.⁶ Feng, Z.⁷ Li, S.⁸

15
- 0000014465
- (1991) J. Eur. Ceram. Soc. , vol.8 , pp. 291
- Azema, N.¹ Durand, R.² Dupuy, C.³ Cot, L.⁴

16
- 0027553430
- (1993) J. Mater. Res. , vol.8 , pp. 565
- Bellosi, A.¹ Landi, E.² Tampieri, A.³

17
- 0001003336
- (1995) J. Appl. Phys. , vol.78 , pp. 6000
- Radhakrishnan, G.¹

18
- 0029288587
- (1995) Thin Solid Films , vol.259 , pp. 154
- Penza, M.¹ De Riccardis, M.F.² Mirenghi, L.³ Tagliente, M.A.⁴ Verona, E.⁵

19
- 0029354516
- (1995) Jpn. J. Appl. Phys. , vol.34 , pp. 4154
- Kumar, S.¹ Tansley, T.L.²

20
- 0025388441
- (1990) Jpn. J. Appl. Phys. , vol.29
- Someno, Y.¹ Sasaki, M.² Hirai, T.³

21
- 0026137470
- (1991) Jpn. J. Appl. Phys. , vol.30 , pp. 790
- Someno, Y.¹ Sasaki, M.² Hirai, T.³

22
- 21844525226
- (1995) J. Vac. Sci. Technol. , vol.13 A , pp. 711
- Kidder J.N., Jr.¹ Kuo, J.S.² Ludvikssori, A.³

23
- 0033149167
- (1999) Thin Solid Films , vol.346 , pp. 174
- Aardahl, C.L.¹ Rogers J.W., Jr.² Yun, H.K.³

24
- 0032614143
- (1999) J. Appl. Phys. , vol.85 , pp. 7879
- Auner, G.W.¹ Jin, F.² Naik, V.M.³

25
- 36449003619
- (1992) Appl. Phys. Lett. , vol.60 , pp. 2234
- Seki, K.¹ Xu, X.Q.² Okabe, H.³ Frye, J.M.⁴ Halpern, J.B.⁵

26
- 0029292172
- (1995) Appl. Phys. Lett. , vol.66 , pp. 2066
- Lin, W.-T.¹ Meng, L.-C.² Chen, G.-J.³

27
- 0001448492
- (1995) Appl. Phys. Lett. , vol.67 , pp. 1549
- Vispute, R.D.¹ Wu, H.² Narayan, J.³

28
- 0001415536
- (1991) J. Appl. Phys. , vol.70 , pp. 2871
- Norton, M.G.¹ Kotula, P.G.² Carter, C.B.³

29
- 0026241256
- (1991) Jpn. J. Appl. Phys. , vol.30
- Bhattacharya, P.¹ Bose, D.N.²

30
- 0031074449
- (1997) Thin Solid Films , vol.295 , pp. 77
- Guidoni, A.G.¹ Mele, A.² Di Palma, T.M.³ Flamini, C.⁴ Orlando, S.⁵ Teghil, R.⁶

31
- 0001547792
- (1995) J. Vac. Sci. Technol. , vol.13 A , pp. 2814
- Kim, I.-H.¹ Kim, S.-H.²

32
- 13544250169
- (1996) Thin Solid Films , vol.281-282 , pp. 321
- Ishihara, M.¹ Yumoto, H.² Tsuchiya, T.³ Akashi, K.⁴

33
- 0034138931
- (2000) Appl. Phys. , vol.70 A , pp. 215
- Meinschien, J.¹ Falk, F.² Hergt, R.³

34
- 4944252842
- (1999) Appl. Phys. , vol.69 A , pp. 683
- Meinschien, J.¹ Behme, G.² Falk, F.³

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