SCOPUS 정보 검색 플랫폼

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 7 B, 1999, Pages 4342-4345

Extended anode effect in coaxial magnetron pulsed plasmas for coating the inside surface of narrow tubes

(5) Sugimoto, Seiki a Uchikawa, Yuki a Kuwahara, Kiyoshi a Fujiyama, Hiroshi a Kuwahara, Hajime b

a NAGASAKI UNIVERSITY (Japan)

b NISSIN ELECTRIC CO LTD (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; COATING TECHNIQUES; CONDUCTIVE FILMS; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC DISCHARGES; MAGNETRON SPUTTERING; SURFACES; THIN FILMS; VELOCITY;

COAXIAL MAGNETRON PULSED PLASMA; INSIDE COATING; NARROW TUBE; PULSE DISCHARGE;

MAGNETOPLASMA;

EID: 0033157548 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.38.4342 Document Type: Article

Times cited : (8)

References (14)

1
- 0006692089
- T. Ihara and H. K. Yasuda: J. Appl. Poly. Sci., Appl. Polym. Symp. 46 (1990) 511.
- (1990) J. Appl. Poly. Sci., Appl. Polym. Symp. , vol.46 , pp. 511
- Ihara, T.¹ Yasuda, H.K.²

2
- 0006654008
- J. A. Sheward: Surf. Coat. Technol. 54/55 (1992) 297.
- (1992) Surf. Coat. Technol. , vol.54-55 , pp. 297
- Sheward, J.A.¹

3
- 21144464412
- R. Hytry, W. Möller, R. Wilhelm and A. V. Keudell: J. Vac. Sci. Technol. A 11 (1993) 2508.
- (1993) J. Vac. Sci. Technol. A , vol.11 , pp. 2508
- Hytry, R.¹ Möller, W.² Wilhelm, R.³ Keudell, A.V.⁴

4
- 0029375565
- R. Hytry, W. Möller and R. Wilhelm: Surf. Coat. Technol. 74/75 (1995) 43.
- (1995) Surf. Coat. Technol. , vol.74-75 , pp. 43
- Hytry, R.¹ Möller, W.² Wilhelm, R.³

5
- 85009896231
- W. Ensinger: Rev. Sci. Instrum. 67 (1996) 318.
- (1996) Rev. Sci. Instrum. , vol.67 , pp. 318
- Ensinger, W.¹

6
- 0030392451
- W. Ensinger: Surf. Coat. Technol. 86/87 (1996) 438.
- (1996) Surf. Coat. Technol. , vol.86-87 , pp. 438
- Ensinger, W.¹

7
- 0026190651
- T. Shigemizu, N. Ohno and H. Fujiyama: Mater. Sci. Eng. A 139 (1991) 312.
- (1991) Mater. Sci. Eng. A , vol.139 , pp. 312
- Shigemizu, T.¹ Ohno, N.² Fujiyama, H.³

8
- 0027680527
- H. Fujiyama, H. Kawasaki, T. Fujiyama and S. Takagi: Surf. Coat. Technol. 59 (1993) 140.
- (1993) Surf. Coat. Technol. , vol.59 , pp. 140
- Fujiyama, H.¹ Kawasaki, H.² Fujiyama, T.³ Takagi, S.⁴

9
- 0006734620
- E. Morisaki and H. Fujiyama: Surf. Coat. Technol. 98 (1997) 834.
- (1997) Surf. Coat. Technol. , vol.98 , pp. 834
- Morisaki, E.¹ Fujiyama, H.²

10
- 0026418967
- H. Kawasaki, T. Nakashima and H. Fujiyama: Mater. Sci. Eng. A 140 (1991) 682.
- (1991) Mater. Sci. Eng. A , vol.140 , pp. 682
- Kawasaki, H.¹ Nakashima, T.² Fujiyama, H.³

11
- 0001497345
- H. Fujiyama, Y. Tokitu, Y. Uchikawa, K. Kuwahara, K. Miyake, H. Kuwahara and A. Doi: Surf. Coat. Technol. 98 (1998) 1467.
- (1998) Surf. Coat. Technol. , vol.98 , pp. 1467
- Fujiyama, H.¹ Tokitu, Y.² Uchikawa, Y.³ Kuwahara, K.⁴ Miyake, K.⁵ Kuwahara, H.⁶ Doi, A.⁷

12
- 0033077331
- Y. Uchikawa, S. Sugimoto, K. Kuwahara, H. Fujiyama and H. Kuwahara: Thin Solid Films. 112 (1999) 185.
- (1999) Thin Solid Films , vol.112 , pp. 185
- Uchikawa, Y.¹ Sugimoto, S.² Kuwahara, K.³ Fujiyama, H.⁴ Kuwahara, H.⁵

13
- 84938413289
- Nikkan Kogyo Shinbunsha, Tokyo, in Japanese
- H. Kobayashi: Supatta Hakumaku (Sputtered Films) (Nikkan Kogyo Shinbunsha, Tokyo, 1993) p. 32 [in Japanese].
- (1993) Supatta Hakumaku (Sputtered Films) , pp. 32
- Kobayashi, H.¹

14
- 33645043567
- Asakurashoten, Tokyo, in Japanese
- R. Tanaka et al.: Kinzokuzairyo no Jiten (Dictionary of Metallic Materials) (Asakurashoten, Tokyo, 1990) pp. 520-521 [in Japanese].
- (1990) Kinzokuzairyo No Jiten (Dictionary of Metallic Materials) , pp. 520-521
- Tanaka, R.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.