Ceramics inner coating of narrow tubes by a coaxial magnetron pulsed plasma

Surface and Coatings Technology

Volumn 98, Issue 1-3, 1998, Pages 1467-1472

  Fujiyama, H ^a   Tokitu, Y ^a   Uchikawa, Y ^a   Kuwahara, K ^a,b   Miyake, K ^b   Doi, A ^b  

^a NAGASAKI UNIVERSITY   (Japan)

^b NISSIN ELECTRIC CO LTD   (Japan)

Author keywords

Coating; Magnetron pulsed plasma; Sputtering; Titanium nitride

Indexed keywords

EID: 0001497345     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00155-2     Document Type: Article

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