Development of a transported coaxial ECR plasma source for inner coating of metallic tubes

Surface and Coatings Technology

Volumn 98, Issue 1-3, 1998, Pages 834-838

  Morisaki, E ^a   Fujiyama, H ^a  

^a NAGASAKI UNIVERSITY   (Japan)

Author keywords

Electron cyclotron resonance plasma; Sputtering; Tube inner coating

Indexed keywords

EID: 0006734620     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00305-8     Document Type: Article

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