Constant growth of V-groove AlGaAs/GaAs multilayers on submicron gratings for complex optical devices

Journal of Crystal Growth

Volumn 221, Issue 1-4, 2000, Pages 201-207

  Son, Chang Sik ^a,b   Kim, Tae Geun ^a,b   Wang, Xue Lun ^a   Ogura, Mutsuo ^a  

^a ELECTROTECHNICAL LABORATORY   (Japan)

^b NEW ENERGY AND INDUSTRIAL TECHNOLOGY DEVELOPMENT ORGANIZATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; DISTRIBUTED FEEDBACK LASERS; HOLOGRAPHY; MASS TRANSFER; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE;

SUBMICRON GRATINGS; V-GROOVE MULTILAYERS;

MULTILAYERS;

EID: 0034511238     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(00)00686-2     Document Type: Article

References (16)

1. P. Demeester, G. Vermeire, F. Vermaerke, I. Moerman, P. Van Daele, A. Gustafsson, L. Samuelson, V. Berger, C. Weisbuch, Low Dimensional Structures Prepared by Epitaxial Growth or Regrowth on Patterned Substrates, NATO ASI Series E, Applied Sciences No. 298, 1989, p. 253.
2. Inoguchi K., Kudo H., Sugahara S., Ito S., Yagi H., Takiguchi H. Jpn. J. Appl. Phys. 33:1994;852.
3. Earles T., Mawst L.J., Botez D. Appl. Phys. Lett. 73:1998;2072.
4. Constantin C., Martinet E., Rudra A., Leifer K., Lelarge F., Biasiol G., Kapon E. J. Crystal Growth. 207:1999;161.
5. Son C.-S., Kim S.-I., Kim Y., Park Y.K., Kim E.K., Min S.K., Choi I.-H. J. Appl. Phys. 82:1997;1205.
6. Son C.-S., Park Y.K., Kim S.-I., Kim Y., Kim E.K., Min S.K., Choi I.-H. Jpn. J. Appl. Phys. 37:1998;1701.
7. Colas E., Simhony S., Kapon E., Bhat R., Hwang D.M., Lin P.S.D. Appl. Phys. Lett. 57:1990;914.
8. York P.K., Connolly J.C., Hughes N.A., Zamerowski T.J., Abeles J.H., Kirk J.B., McGinn J.T., Murphy K.B. J. Cystal Growth. 124:1992;709.
9. Sogawa T., Ando S., Kanbe H. Appl. Phys. Lett. 64:1994;472.
10. Kim T.G., Kim E.K., Min S.K., Park J.H. Appl. Phys. Lett. 69:1996;955.
11. Nagai H., Noguchi Y., Matsuoka T. J. Crystal Growth. 71:1985;225.
12. Schilling M., Wunstel K. Appl. Phys. Lett. 49:1986;710.
13. Kojima K., Misunaga K., Kyuma K. Appl. Phys. Lett. 56:1990;154.
14. Koui T., Sakata Y., Sasaki Y., Matsumoto T., Komatsu K. J. Crystal Growth. 195:1998;503.
15. Joyce B.A., Dobson P.J., Neave J.H., Woodbridge K., Zhang J., Larsen P.K., Bôlger B. Surf. Sci. 168:1986;423.
16. T.G. Kim, C.S. Son, M. Ogura, unpublished.