SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 379, Issue 1-2, 2000, Pages 101-106

Low temperature process for nano-structure formation with Si films

(2) Nam, Hyoung Gin a Koo, Kyoung Hwan a

a SunMoon University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MODIFICATION; CRYSTALLIZATION; CURRENT VOLTAGE CHARACTERISTICS; DEPOSITION; EVAPORATION; FILM PREPARATION; GRAIN BOUNDARIES; HEAT TREATMENT; MORPHOLOGY; NANOSTRUCTURED MATERIALS; OXIDATION; SEMICONDUCTING SILICON;

NANOSTRUCTURE FORMATIONS;

SEMICONDUCTING FILMS;

EID: 0034510627 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(00)01551-0 Document Type: Article

Times cited : (3)

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