A Multifunctional Laser Linking and Cutting Structure for Standard 0.25 μm CMOS-Technology

Proceedings - IEEE International Symposium on Defect and Fault Tolerance in VLSI Systems

Volumn Part F5373300, Issue , 2000, Pages 114-122

  Mende, Ole ^a   Redeker, Michael ^a   Rudack, Markus ^a   Treytnar, Dieter ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CUTTING TOOLS; ITERATED SWITCHING NETWORKS; LASER BEAM CUTTING; OPTIMIZATION; PARAMETER ESTIMATION; PRINTED CIRCUIT DESIGN;

0.25 ΜM; AREA REDUCTION; CMOS TECHNOLOGY; CUTTING STRUCTURE; DESIGN RULES; LASER ARRAYS; LASER LINKS; LASER STRUCTURES; METAL CMOS PROCESS; PROCESSING TIME;

CMOS INTEGRATED CIRCUITS;

LASER LINKING; LASER SWITCH;

EID: 0034507773     PISSN: 15505774     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DFTVS.2000.887149     Document Type: Conference Paper

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