Atomic layer-by-layer metal-organic chemical vapor deposition of SrTiO3 films with a very smooth surface

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 3 A, 1998, Pages 942-947

  Wang, Zaiyang ^a   Oda, Shunri ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

AFM; ALMOCVD; Co deposition MOCVD; FWHM; SrTiO3; Surface morphology; Thin film; XRD

Indexed keywords

ATOMIC FORCE MICROSCOPY; FILM GROWTH; FILM PREPARATION; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MORPHOLOGY; STRONTIUM COMPOUNDS; SURFACE PROPERTIES; TITANIUM COMPOUNDS; X RAY DIFFRACTION;

STRONTIUM TITANATE; THIRD GENERATION DIPIVALOYLMETHANE CHELATE;

THIN FILMS;

EID: 0032023316     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.942     Document Type: Article

References (16)

1. T. Sakuma, S. Yamamichi, S. Matsubara, H. Yamaguchi and Y. Miyasaka: Appl. Phys. Lett. 57 (1990) 2431.
2. D. A. Scribner, M. K. Kruer and J. M. Killiany: Proc. IEEE 79 (1991) 66.
3. E. L. Dereniak and D. G. Crowe: Optical Radiation Detectors (Wiley, New York, 1984).
4. Q. X. Jia, X. D. Wu, S. R. Foltyn and P. Tiwari: Appl. Phys. Lett. 66 (1995) 2197.
5. H. Tabata, H. Tanaka, T. Kawai and M. Okuyama: Jpn. J. Appl. Phys. 34 (1995) 544.
6. W. B. Pennebaker: IBM J. Res. & Dev. 13 (1969) 686.
7. G. Campet, M. Carrere, C. Pupridritkun, S. Z. Wen, J. Salardenne and J. Claverie: J. Solid State Chem. 69 (1987) 267.
8. S. Yamamichi, T. Sakuma, K. Takemura and Y. Miyasaka: Jpn. J. Appl. Phys. 30 (1991) 2193.
9. R. F. Pinnizzotto, E. G. Jacobs, H. Yang, S. R. Summerfelt and B. E. Gnade: Mater. Res. Soc. Symp. Proc. 243 (1992) 267.
10. M. Azuma, M. Scott, E. Fujii, T. Otsuki, G. Kano and C. A. Araujo: Proc. 4th Int. Symp. Integrated Ferroelectrics, Monterey. 1992, p. 109.
11. H. Yamaguchi, P. Y. Lesaicherre, T. Sakuma, Y. Miyasaka, A. Ishitani and M. Yoshida: Jpn. J. Appl. Phys. 32 (1993) 4069.
12. S. R. Gilbert, B. W. Wessels, D. B. Studebaker and T. J. Marks: Appl. Phys. Lett. 66 (1995) 3298.
13. C. S. Kang, C. S. Hwang, H. J. Cho, B. T. Lee, S. O. Park, J. W. Kim, H. Horii, S. I. Lee, Y. B. Koh and M. Y. Lee: Jpn. J. Appl. Phys. 35 (1996) 4890.
14. N. Kobayashi, T. Makimoto and Y. Horikoshi: Jpn. J. Appl. Phys. 24 (1985) L962.
15. T. Aoyama, S. Yamazaki and K. Imai: Ext. Abstr. 58th Autumn Meet. Japan Society of Applied Physics, Akita, 1997, Vol. 2, p. 507 [in Japanese].
16. T. Kimura, H. Yamauchi, H. Machida, H. Kokubun and M. Yamada: Jpn. J. Appl. Phys. 33 (1994) 5119.