Lateral OMVPE growth of GaAs on patterned substrates

Journal of Crystal Growth

Volumn 220, Issue 4, 2000, Pages 364-378

  Reichert, W ^a   Cohen, R M ^a  

^a UNIVERSITY OF UTAH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CRYSTAL ORIENTATION; DIFFUSION; METALLORGANIC VAPOR PHASE EPITAXY; MOLECULAR BEAM EPITAXY; SEMICONDUCTOR GROWTH; SUBSTRATES;

LATERAL EPITAXIAL GROWTH;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0034504132     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(00)00829-0     Document Type: Article

References (19)

1. Okumura H., Saito N., Kusano J.-I., Aida T., Sato F., Takizawa K. Jpn. J. Appl. Phys. 37:1998;L484.
2. Goto K., Takemi M., Miura T., Takemoto A., Mihashi Y. J. Electron. Mater. 25(3):1996;411.
3. Nötzel R., Schönherr H.-P., Niu Z., Däweritz L., Ploog K.H. J. Crystal Growth. 201/202:1999;814.
4. Yoh K., Nakasaki R., Takabayashi S. J. Crystal Growth. 201/202:1999;1164.
5. Brauers Heinecke A., Grafahrend F., Plass C., Pütz N., Werner K., Meyers M., Lütz H., Balk P. J. Crystal Growth. 77:1986;303.
6. Asai H. J. Crystal Growth. 80:1987;425.
7. Shen X.-Q., Nishinaga T. Jpn. J. Appl. Phys. 32:1993;L1117.
8. Reichert W., Cohen R.M. J. Electron. Mater. 29(1):2000;118.
9. Lamelas F.J., Fuoss P.H., Kisker D.W., Stepehnson G.B., Imperatori P., Brennan S. Phys. Rev. B. 49(3):1994;1957.
10. Payne A.P., Fuoss P.H., Kisker D.W., Stepehnson G.B., Brennan S. Phys. Rev. B. 49(20):1994;14427.
11. Kasu M., Kobayashi N. Jpn. J. Appl. Phys. 33(1):1994;712.
12. Ohta K., Kojima T., Nakagawa T. J. Crystal Growth. 95:1989;71.
13. Kobayashi Y., Kobayashi N. J. Electron. Mater. 25(4):1996;691.
14. Däweritz L., Hey R. Surf. Sci. 236:1990;15.
15. Ohno T. Thin Solid Films. 272:1996;331.
16. Kawabe M., Sugaya T. Jpn. J. Appl. Phys. 28(7):1989;L1077.
17. Nötzel R., Menninger J., Ramsteiner M., Trampert A., Schönherr H.-P., Däweritz L., Ploog K.H. J. Crystal Growth. 175/176:1997;1114.
18. Yang H., LaBella V.P., Bullock D.W., Ding Z., Smathers J.B., Thibado P.M. J. Crystal Growth. 201/202:1999;88.
19. Kisker D.W., Stephenson G.B., Kamiya I., Fuoss P.H., Aspnes D.E., Mantese L., Brennan S. Phys. Stat. Sol. A. 152:1995;9.