Laser processing of ceramics and metals by high-intensity picosecond and nanosecond laser pulses in UV, visible, and IR range of spectrum

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2703, Issue , 1996, Pages 442-456

  Garnov, Serge V ^a   Klimentov, Sergei M ^a   Kononenko, Taras V ^a   Konov, Vitali I ^a   Lubnin, E N ^a   Dausinger, Friedrich ^b   Raiber, Armin ^b  

^a PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

^b UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Ceramics; Laser ablation; Laser microprocessing; Ultrashort laser pulses

Indexed keywords

ABLATION; ALUMINA; CERAMIC MATERIALS; CHEMICAL MODIFICATION; ELECTRON IRRADIATION; IRRADIATION; LASER ABLATION; LASER APPLICATIONS; LASER BEAMS; LASER PULSES; LASERS; MICROELECTRONICS; NEODYMIUM LASERS; POWER QUALITY; PULSE GENERATORS; PULSED LASER DEPOSITION; RADIATION DAMAGE; SCANNING ELECTRON MICROSCOPY; THEOREM PROVING; ULTRASHORT PULSES;

ABLATED HOLES; ABLATION PROCESSES; ABLATION RATES; ACTIVE MODES; CERAMIC SURFACES; CERAMICS; CHEMICAL COMPOSITIONS; EXPERIMENTAL INVESTIGATIONS; HIGH QUALITIES; INCIDENT POWERS; INTERACTION PROCESSES; IRRADIATION CONDITIONS; LASER MICROPROCESSING; LASER PROCESSING; MULTIPULSE IRRADIATIONS; NANO-SECONDS; NANOSECOND LASER PULSES; NANOSECOND RANGES; ND:YAP LASERS; OUTPUT RADIATIONS; PEAK POWERS; PHYSICAL MECHANISMS; PLASMA FORMATIONS; PULSE DURATIONS; REPETITION RATES; SCANNING ELECTRON MICROSCOPES; SECOND AND FOURTH HARMONICS; TEMPORAL DISTRIBUTIONS; ULTRA SHORTS; ULTRASHORT LASER PULSES;

PULSED LASER APPLICATIONS;

EID: 0038183440     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.237755     Document Type: Conference Paper

References (4)

1. Th. Beuermann, H. J. Brinkmann, T. Damm, M. Stuke, "Picosecond UV excimer laser ablation of LiNbO3," Mat. Res. Soc. Symp. Proc., vol. 191, pp. 37-42, 1990.
2. W. Kautek and J. Kruger, "Femtosecond pulse laser ablation of metallic, semiconducting, ceramic, and biological materials," SPIE, vol. 2207, pp. 600-611, 1994.
3. J. Kruger and W. Kautek, "Femtosecond-pulse laser processing of metallic and semiconducting thin films," SPIE, vol. 2403, 1995, in press.
4. A. Jadin, K. Starbova, K. Kolev and L. D. Laude, "Transient structural modifications of sintered commercial aluminum nitride ceramics resulting from low fluence excimer laser irradiation," Excimer Lasers, L. D. Laude (ed.), vol. 265, pp. 411-416, Kluwer Academic Publishers, Dordrecht, 1994.