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Volumn 221, Issue 1-4, 2000, Pages 142-148
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Quantifying the smoothing of GaN epilayer growth by in situ laser interferometry
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Author keywords
[No Author keywords available]
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Indexed keywords
INTERFEROMETRY;
LASER APPLICATIONS;
LIGHT REFLECTION;
METALLORGANIC VAPOR PHASE EPITAXY;
RECRYSTALLIZATION (METALLURGY);
SENSITIVITY ANALYSIS;
SURFACE ROUGHNESS;
THIN FILMS;
EPILAYERS;
LASER INTERFEROMETRY;
SEMICONDUCTING GALLIUM COMPOUNDS;
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EID: 0034499887
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(00)00674-6 Document Type: Article |
Times cited : (16)
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References (13)
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