Physical properties of (Ba,Sr)TiO3 thin films used for integrated capacitors in microwave applications

IEEE International Symposium on Applications of Ferroelectrics

Volumn 1, Issue , 2000, Pages 365-368

  Ayguavives, Tito ^a   Tombak, Ali ^a   Maria, Jon Paul ^a   Stauf, Gregory T ^a   Ragaglia, Craig ^a   Roeder, Jeff ^a   Mortazawi, Amir ^a   Kingon, Angus I ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM COMPOUNDS; COMPOSITION EFFECTS; DIELECTRIC LOSSES; ELECTRIC PROPERTIES; FILM GROWTH; FREQUENCIES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROWAVE DEVICES; SURFACE ROUGHNESS; THICKNESS MEASUREMENT;

BARIUM STRONTIUM TITANATE; MICROWAVE FREQUENCIES; TUNABILITY;

FERROELECTRIC THIN FILMS;

EID: 0034470399     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)