Dielectric behavior of CVD (Ba,Sr)TiO3 thin films on Pt/Si

Materials Research Society Symposium - Proceedings

Volumn 415, Issue , 1996, Pages 219-224

  Streiffer, S K ^a   Basceri, C ^a   Kingon, A I ^a   Lipa, S ^a   Bilodeau, S ^a   Carl, R ^a   Van Buskirk, P C ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; ELECTRODES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROSTRUCTURE; PERMITTIVITY; PHOTOLITHOGRAPHY; PLATINUM; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SILICON WAFERS; TITANIUM OXIDES;

CAPACITANCE VOLTAGE ANALYSIS; DIELECTRIC LOSS; ELECTRON BEAM EVAPORATION; IMPEDANCE ANALYZER; ION BEAM ETCHING; LIQUID SOURCE METALORGANIC CHEMICAL VAPOR DEPOSITION; LOW FREQUENCY IMPEDANCE SPECTROSCOPY;

THIN FILMS;

EID: 0029754601     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)