The effect of bottom electrode on the performance of thin film based capacitors in the gigahertz region

Applied Physics Letters

Volumn 74, Issue 23, 1999, Pages 3546-3548

  Dube, D C ^a,b   Baborowski, J ^b   Muralt, P ^b   Setter, N ^b  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

^b EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC LOSSES; DIELECTRIC RELAXATION; ELECTRODES; ETCHING; FREQUENCY RESPONSE; MAGNETRON SPUTTERING; MIM DEVICES; PHOTOLITHOGRAPHY; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MODELS; SUBSTRATES; THIN FILMS;

CONTACT RESISTANCE; FINITE ELECTRODE RESISTANCE;

CAPACITORS;

EID: 0032614826     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124156     Document Type: Article

References (13)

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