|
|
Volumn 31, Issue 1-4, 2000, Pages 323-331
|
|
Degradation of Pt/PLZT/Pt capacitors caused by hydrogen in interlayer dielectrics
a
a
HITACHI LTD
(Japan)
|
|
Author keywords
Dielectrics; Ferroelectric; Hydroxyl; Imprint; Nonvolatile memory; PLZT; TDS
|
|
Indexed keywords
AGING OF MATERIALS;
CATALYST ACTIVITY;
COMPOSITION EFFECTS;
DEGRADATION;
DESORPTION;
DIELECTRIC MATERIALS;
FERROELECTRICITY;
HYDROGEN;
LEAD COMPOUNDS;
PASSIVATION;
POLARIZATION;
SPECTROSCOPIC ANALYSIS;
IMPRINT PHENOMENA;
INTERLAYER DIELECTRICS;
MEMORY ARRAY CAPACITORS;
THERMAL DESORPTION SPECTROSCOPY;
CAPACITORS;
|
|
EID: 0034446297
PISSN: 10584587
EISSN: None
Source Type: Journal
DOI: 10.1080/10584580008215665 Document Type: Conference Paper |
|
Times cited : (3)
|
|
References (7)
|
