Effect of grain size on degradation of Pt/PLZT/Pt capacitor

Ferroelectrics

Volumn 225, Issue 1-4, 1999, Pages 163-170

  Ogata, Kiyoshi ^a   Suenaga, Kazufumi ^a   Horikoshi, Kazuhiko ^a   Yoshizumi, Keiichi ^a   Kato, Hisayuki ^a   Mori, Mitsuhiro ^a  

^a HITACHI LTD   (Japan)

Author keywords

Fatigue; Ferroelectric capacitors; Grain size; PLZT; Roughness

Indexed keywords

EID: 0005021767     PISSN: 00150193     EISSN: None     Source Type: Journal    
DOI: 10.1080/00150199908009124     Document Type: Article

References (7)

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6. K. Aoki et al., Extended Abstracts of PacRimFerro3, IV-9 (1996).
7. T. D. Hadnagy, Integrated Ferroelectrics, 18, 1 (1997).