SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium - Proceedings

Volumn 609, Issue , 2000, Pages A1951-A1956

Improved crystallinity of microcrystalline silicon films using deuterium dilution

(3) Suzuki, Susumu a Kondo, Michio a Matsuda, Akihisa a

a ELECTROTECHNICAL LABORATORY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; CRYSTALLIZATION; EMISSION SPECTROSCOPY; ENERGY GAP; EPITAXIAL GROWTH; FILM GROWTH; HYDROGEN; ION BOMBARDMENT; PHASE TRANSITIONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RATE CONSTANTS; SEMICONDUCTING SILICON;

EXCHANGE REACTIONS;

THIN FILMS;

EID: 0034428586 PISSN: 02729172 EISSN: None Source Type: Journal
DOI: 10.1557/proc-609-a19.5 Document Type: Article

Times cited : (3)

References (11)

1
- 0032664229
- (1998) Mat. Res. Soc. Symp. Proc. , vol.507 , pp. 131
- Yamamoto, K.¹ Yoshimi, M.² Suzuki, T.³ Tawada, Y.⁴ Okamoto, Y.⁵ Nakajima, A.⁶

2
- 0030396396
- (1996) Mat. Res. Soc. Symp. Proc. , vol.420 , pp. 3
- Meier, J.¹ Torres, P.² Platz, R.³ Dubail, S.⁴ Kroll, U.⁵ Anna Selvan, J.A.⁶ Pellaton Vaucher, N.⁷ Hof, C.H.⁸ Fischer, D.⁹ Keppner, H.¹⁰ Shah, A.¹¹ Ufert, K.D.¹² Giannoules, P.¹³ Koehler, J.¹⁴

3
- 0003545701
- Sapporo, Japan
- (1999) Technical digest, PVSEC-11 , pp. 239
- Feitknecht, L.¹ Kluth, O.² Ziegler, Y.³ Niquille, X.⁴ Torres, P.⁵ Meier, J.⁶ Wyrsch, N.⁷ Shah, A.⁸

4
- 0032179064
- (1998) Jpn. J. Appl. Phys. , vol.37
- Guo, L.¹ Kondo, M.² Fukawa, M.³ Saitoh, K.⁴ Matsuda, A.⁵

5
- 85009849460
- in press
- J. Non-cryst. Solids.
- Kondo, M.¹ Fukawa, M.² Guo, L.³ Matsuda, A.⁴

6
- 0001694723
- (1999) Appl. Phys. Lett. , vol.75 , pp. 3515
- Guo, L.¹ Toyoshima, Y.² Kondo, M.³ Matsuda, A.⁴

7
- 0000237833
- (1997) Appl. Phys. Lett. , vol.71 , pp. 1498
- Wei, J.H.¹ Sun, M.S.² Lee, S.C.³

8
- 36449009023
- (1993) J. Chem. Phys. , vol.99 , pp. 5619
- Koleske, D.D.¹ Gates, S.M.² Schultz, J.A.³

9
- 0001126367
- (1998) Appl. Phys. Lett. , vol.72 , pp. 456
- Srinivasan, E.¹ Parsons, G.N.²

10
- 0026153673
- (1991) Jpn. J. Appl. Phys. , vol.30 , pp. 893
- Jia, Y.¹ Yamada, A.² Konagai, M.³ Takahashi, K.⁴

11
- 18244415180
- (1993) J. Non-cryst. Solids. , vol.164-166 , pp. 103
- Toyoshima, Y.¹ Matsuda, A.² Arai, K.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.