Investigation of non-diamond carbon phases and optical centers in thermochemically polished polycrystalline CVD diamond films

Journal of Solid State Electrochemistry

Volumn 4, Issue 8, 2000, Pages 425-434

  Weima, J A ^a   Zaitsev, A M ^a   Job, R ^a   Kosaca, G ^a   Blum, F ^a   Grabosch, G ^a   Fahrner, W R ^a   Knopp, J ^b  

^a UNIVERSITY OF HAGEN   (Germany)

^b Fries Research and Technology GmbH   (Germany)

Author keywords

Atomic force microscopy; Defects; Diamond films; Non diamond phases; Thermochemical polishing

Indexed keywords

EID: 0034369286     PISSN: 14328488     EISSN: None     Source Type: Journal    
DOI: 10.1007/s100089900099     Document Type: Article

References (29)

1. Chio SR, Jung DY, Kweon SY, Jung SK (1996) Thin Solid Films 279: 110
2. Yoshikawa M, Okuzumi F (1996) Surf Coat Technol 88: 197
3. Ramesham R, Rose MF (1998) Thin Solid Films 320: 223
4. Zaitsev AM, Kosaca G, Richarz B, Raiko V, Job R, Fries T, Fahrner WR (1998) Diamond Relat Mater 7: 1108
5. Van Enckevort WJP, Van Halewijn HJ (1994) Shaping of diamond. In: David G (ed) Properties and growth of diamond. INSPEC, London, p 293
6. Jin S, Zhu W, Groebner TE (1995) Techniques for diamond thinning and polishing by diffusional reactions with metals. In: Feldman A, Tzeng Y, Yarbrough WA, Yoshikawa M, Murakawa M (eds) 3rd international conference on applications of diamond films and related materials. NIST special publication 885, Gaithersburg MD, USA, p 209
7. Koslowski B, Strobel S, Wenig MJ, Martschat R, Ziemann P (1998) Diamond Relat Mater 7: 322
8. Okuzumi F, Yang CF, Yishikawa M (1995) Applications for precision cutting of sharpening CVD diamond film. In: Feld- man A, Tzeng Y, Yarbrough WA, Yoshikawa M, Murukawa M (eds) 3rd international conference on applications of diamond films and related materials. NIST special publication 889, Gaithersburg, MD, USA, p 201
9. Okuzumi F, Yang CF, Yishikawa M (1995) Diamond Films Technol 4: 233
10. Yoshikawa M (1990) SPIE Proc Ser 1325: 210
11. Tokura A, Yang CF, Yoshikawa M (1992) Thin Solid Films 212: 49
12. Okuzumi F, Tokura H, Yoshikawa M (1994) Cutting performance of CVD diamond polished by thermo-chemical polishing method. In: Saito S, Fujimori N, Fukunaga O, Kamo M, Kobashi K, Yoshikawa M (eds) Advances in new diamond science and Technology. MYU, Tokyo, p 783
13. Grigoriev AP, Lifshits SC, Shamaev PP (1977) Kinet Catal 18: 948
14. Vishnevskii AS, Lysenko AV (1974) Synth Diamonds 4: 7
15. Phillips RW (1994) Surf Coat Technol 68/69: 770
16. Koslowski B, Strobel S, Wenig MJ, Marzschat R, Ziemann P (1998) Diamond Relat Mater 7: 322
17. Zhang Q, Yoon SF, Ahn J, Rusli, Guo YP (1998) Microelectron J 29: 875
18. Sails SR, Gardiner DJ, Bowden M, Savage J, Rodway D (1996) Diamond Relat Mater 5: 589
19. Vorlilek V, Rosa J, Vanecek M, Nesladek M, Stals L (1997) Diamond Relat Mater 6: 704
20. Grasselli JG, Buklin BJ (1991) Analytical raman spectroscopy. (Monographs on analytical chemistry and its applications, vol 114) Wiley, New York
21. Shiano S, Hoffman RW (1996) Thin Solid Films 283: 145
22. Zaitsev AM, Melnikov AA, Denisenko AV, Varichenko VS, Job R, Fahrner WR (1996) MRS Symp proc Ser 416: 113
23. Zaitsev AM, Uliyashin AG, Ali Noor H (1991) Superhard materials 1: 18
24. Ulyashin AG, Zaitsev AM, Ali Noor H (1992) Mater Sci Eng B11: 359
25. Mita Y (1996) Phys Rev B 53: 11360
26. Lawson SC, Fisher D, Hunt DC, Newton ME (1998) J Phys Condens Matter 10: 6171
27. Loubser JHN, Wyl JA (1978) Rep Prog Phys 41: 1210
28. Mainwood A (1994) Phys Rev 49: 746
29. Bergmann L, Stomer BR, Turner KF, Glass JT, Nemanich RJ (1993) J Appl Phys 73: 3951