The effects of nitrogen flow on the Raman spectra of polycrystalline diamond films

Microelectronics Journal

Volumn 29, Issue 11, 1998, Pages 875-879

  Zhang, Qing ^a   Yoon, S F ^a   Ahn, J ^a   Rusli, ^a   Guo, Yong Ping ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Polycrystalline diamond films; Raman scattering; X ray diffraction

Indexed keywords

FILM PREPARATION; NITROGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS; RAMAN SCATTERING; RAMAN SPECTROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

NITROGEN FLOW RATIO; POLYCRYSTALLINE DIAMOND FILMS;

DIAMOND FILMS;

EID: 0032210119     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0026-2692(98)00047-0     Document Type: Article

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