Spectroscopic ellipsometry studies on ultrathin hydrogenated amorphous silicon films prepared by thermal chemical vapor deposition

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 11, 2000, Pages 6196-6201

  Hazra, Sukti ^a   Yamanaka, Mitsuyuki ^a   Sakata, Isao ^a   Tsutsumi, Toshiyuki ^a   Maeda, Tatsuro ^a   Suzuki, Eiichi ^a  

^a ELECTROTECHNICAL LABORATORY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CHEMICAL VAPOR DEPOSITION; ELLIPSOMETRY; HYDROGENATION; MORPHOLOGY; SPECTROSCOPIC ANALYSIS; ULTRATHIN FILMS;

SPECTROSCOPIC ELLIPSOMETRY; THERMAL CHEMICAL VAPOR DEPOSITION;

AMORPHOUS FILMS;

EID: 0034316180     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.6196     Document Type: Article

References (19)

1. M. Konagai: 11th Int. PVSEC, Hokkaido, Japan (1999) p. 25.
2. E. Leobandung, L. Guo, Y. Wang and S. Y. Chou: Appl. Phys. Lett. 67 (1995) 938.
3. S. Tiwari, F. Rana, H. Hanafi, A. Hartstein, E. F. Crabbe and K. Chan: Appl. Phys. Lett. 68 (1996) 1377.
4. I. An, H. V. Nguyen, N. V. Nguyen and R. W. Collins: Phys. Rev. Lett. 65 (1990) 2274.
5. H. Tanino, G. Ganguly and A. Matsuda: Phys. Rev. B 46 (1992) 15277.
6. W. Futako, K. Yoshino, C. M. Fortmann and I. Shimizu: J. Appl. Phys. 85 (1999) 812.
7. W. Futako, S. Takeoka, C. M. Fortmann and I. Shimizu: J. Appl. Phys. 84 (1998) 1333.
8. S. Hamma and P. Roca i Cabarrocas: J. Non-Cryst. Solids 227-230 (1998) 852.
9. R. M. A. Azzam and N. M. Bashara: Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
10. A. R. Forouchi and J. Boomer: Phys. Rev. B 34 (1986) 7018.
11. G. E. Jellison, Jr. and F. A. Modine: Appl. Phys. Lett. 69 (1996) 371.
12. I. H. Malitson: J. Opt. Soc. Am. 55 (1965) 1205.
13. F. Wooton: Optical Properties of Solids (Academic, New York, 1972).
14. G. E. Jellison, Jr.: J. Appl. Phys. 69 (1991) 7627.
15. D. E. Aspnes and J. B. Theeten: J. Electrochem. Soc. 127 (1980) 1359.
16. R. Hulthen: Phys. Scr. 12 (1975) 342.
17. D. A. G. Bruggemann: Ann. Phys. (Leipzig) 24 (1935) 636.
18. G. D. Cody: Semiconductors and Semimetals, ed. J. L. Pankove (Springer, Heidelberg, 1984) Vol. 21, p. 70.
19. D. E. Aspnes: Proc. SPIE 276 (1981) 188.