Fabrication of nanoscale cubic SiC particle film

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 11, 2000, Pages 6202-6207

  Sun, Yong ^a   Kirimoto, Kenta ^a   Miyasato, Tatsuro ^a  

^a KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALLIZATION; FILM GROWTH; MORPHOLOGY; NANOSTRUCTURED MATERIALS; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE; SPUTTERING; SUBSTRATES;

BUFFER LAYERS; HYDROGEN PLASMA SPUTTERING;

THIN FILMS;

EID: 0034315305     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.6202     Document Type: Article

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