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Volumn 39, Issue 5 A, 2000, Pages
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Improvement of annealing properties of SiC/Si structure
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
CRYSTAL STRUCTURE;
HYDROGEN;
PLASMA SPRAYING;
POINT DEFECTS;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTING SILICON COMPOUNDS;
SHRINKAGE;
SILICON CARBIDE;
SILICON WAFERS;
SPUTTER DEPOSITION;
VAPORIZATION;
LINE DEFECTS;
SEMICONDUCTING FILMS;
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EID: 0033686170
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.39.l396 Document Type: Article |
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Times cited : (1)
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References (11)
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