Micromechanical reliability evaluation of mirror devices through applying accelerated electrostatic force

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3878, Issue , 1999, Pages 101-111

  Park, Byungwoo ^a   Bu, Jonguk ^a   Kwon, Dongil ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; FATIGUE TESTING; LASER BEAM EFFECTS; MICROMACHINING; MICROSTRUCTURE; MIRRORS; RELIABILITY; THIN FILMS;

ACCELERATED ELECTROSTATIC FORCE; ANNULAR SHUTTER MIRROR; DIGITAL VIDEO DISK; FATIGUE EFFECTS; MICROMECHANICAL RELIABILITY; MIRROR DEVICES; THIN FILM STRUCTURAL MATERIALS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033319377     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)