Ion-beam thinning. An atomistic view by molecular dynamics simulations

Ultramicroscopy

Volumn 85, Issue 1, 2000, Pages 15-21

  Mazzone, A M ^a  

^a CNR   (Italy)

Author keywords

Ion beam thinning; Molecular dynamics; Silicon surface

Indexed keywords

COMPUTER SIMULATION; MOLECULAR DYNAMICS; RADIATION DAMAGE; SPECIMEN PREPARATION;

ION BEAM THINNING;

ION BOMBARDMENT;

SILICON;

ARTICLE; ATOM; COMPUTER SIMULATION; ENERGY; MOLECULAR DYNAMICS; RADIATION BEAM; TOPOGRAPHY;

EID: 0034285132     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(00)00037-1     Document Type: Article

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