Bandwidth analysis of a microgyroscope vibrating in two orthogonal axes on the substrate plane

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3680, Issue II, 1999, Pages 939-947

  Hong, Yoon shik ^a   Lee, Jong hyun ^a   Lee, Chang seung ^a   Jang, Won ick ^a   Choi, Chang auck ^a   Kim, Soo hyun ^a   Kwak, Yoon kun ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; BANDWIDTH; GYROSCOPES; MICROELECTRODES; MICROELECTROMECHANICAL DEVICES; REACTIVE ION ETCHING; SENSITIVITY ANALYSIS; SILICON; SUBSTRATES; VIBRATIONS (MECHANICAL);

GAS-PHASE ETCHING (GPE); MICROGYROSCOPES;

INTEGRATED OPTOELECTRONICS;

EID: 0032672392     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.341161     Document Type: Conference Paper

References (9)